Angle Valve from SMC, Pneumatic, Softpump

Softpump or Smooth Exhaust valves consist of two pneumatic valves incorporated in one component: a primary valve with the indicated flange size and a smaller valve with adjustable port for "soft" pump-down. The latter can prevent both turbulence, which could otherwise stir up particulate matter, and pump overload. Because the small size of these valves does not permit use of standard control valves, this series is equipped with two integral control valves.

• Temperature range: 5 to 50 °C
• Pressure range: 1 x 10^-8 mbar to 1 bar (abs.)
• Bellows-sealed (Spring Bellow 316L)
• Valve plate seal: FPM (fluororubber)
• Leakage rate 1.3 x 10^-9 mbar l/s (without permeation)
• Cycles to first maintenance: 2,000,000
• Cleaned and packaged suitable for cleanroom use
• Pneumatics: Normally closed; 24V with overvoltage protection
• Two integral control valves; electrical connections for two SY100 control valves (see pneumatic accessories)
• Equipped for position sender on primary valve (see SMC accessories)
• Options: Heater to prevent vapor condensation, double-action pneumatics