Precision Z-axis Manipulator
- Pressure range: 1 x 10-10 to 1000 mbar (abs.)
- Tightness: < 1 x 10-10 mbar x l/s
- Operating temperature: 80 °C
- Bakeout temperature: 200 °C
- Number of cycles: 10,000 at full deflection
- Materials:
bellow: stainless steel 316L
tube: stainless steel 304L
flange: stainless steel 304L
housing: stainless steel
- The large measuring and operating drums are easy to handle and enable precise adjustment with a resolution and reproducibility of 2 µm and a setting accuracy of 3 µm. A heating sleeve can be mounted on the bellows in the accessible installation area. (CAU
- We wanted to build a UHV manipulator that would withstand vacuum pressure without deformation, at the same time would be easy to convert to motorized drives. This is why we developed the TRINOS Z-axis manipulator, which satisfies all of these requirements
- Motorized drive can be used immediately without refitting the spindle drive
- Zero-backlash spindle without stick-slip effect assures maximum positioning accuracy
- Very long spindle service life
- Innovative, zero-backlash guides
- Warp-resistant design means the manipulator will not buckle significantly, even under vacuum
- Spindle drive brake prevents independent movement
- Bakeable to 200 °C
- Entire structural element made of steel: Accuracy increased by prevention of varying expansion coefficients
- Resolution: 0.005 mm
- Manufactured entirely at TRINOS; all parameters can be adapted to user requirements
- FEM simulation of mechanical behavior possible
- FEM simulation of mechanical behavior possible
- Accessories:
- Custom attachments
- X/Y-axis manipulator
- Reducers
- Crosses
- Seals
- Couplings
- Options:
- Motorization:
- Stepping motor
- Servo motor
- DC motor
- Motor control systems
- Other options:
- Dimensions adaptable to customer specifications
- Dimensions adaptable to customer specifications
