Rectangular Gate Valve from SMC, Pneumatic

These pneumatically operated rectangular gate valves are especially suitable for wafer transfer. Their design makes them insensitive to wear,
as the gate is first lifted before being pressed against the sealing surface. This technique is also termed "L-motion."
The drives are available in a variety of cassette dimensions.

• Especially low particulate emissions
• L-motion
• Cycles to first maintenance: 2,000,000 up to DN 40; 50,000 up to DN 200
• Endlock: Valve engages at stop, even in the event of pneumatic outage
• Wiper on lifting cylinder protects drive from wafer fragments
• Pressure range: 1 x 10^-6 mbar to 1 bar (abs.) in both directions
• Leakage rate: Better than 6 x 10^-8 mbar l/s in both directions
• Differential opening pressure: 40 mbar
• Temperature range: 5 to 150 °C at gate; 60 °C at actuator
• Seal: FPM (fluororubber)
• Options: Kalrez^® seal; other cassette dimensions; position sender; wide rectangular gate valves (> 800 mm) with multiple drives upon request