Smooth-Vent Venting Valve from SMC, Pneumatic
Smooth-Vent valves consist of two pneumatic valves in a single component: A bellows-sealed primary valve with maximum opening and a diaphragm valve with adjustable conductance for smooth venting. The adjustment knob has a calibrated scale. This valve system prevents both strong gas shocks when venting and turbulence that can stir up particulate matter. Due to its small size, the two M5 compressed air inlets are positioned close together and there are no integral control valves.
- Connectors: Swagelok® tube union or VCR® sealing system
- For use e.g. as chamber venting valve, installed on gas line
- Pressure range: 1 x 10-8 mbar to 2 bar (abs.)
- Leakage rate: 5 x 10-8 mbar l/s (without permeation)
- Seal: FPM (fluororubber)
- Temperature range: 5 to 40 °C
- Cleaned and packaged suitable for cleanroom use
- Pneumatics: Normally closed
- Primary valve opening: 3 mm diameter/4.6 mm² effective, Smooth-Vent opening: Adjustable, 0.2 - 4.6 mm² effective
- Opening main valve: 2 mm (0.08") diameter, 4.6 mm² (0.007 in²) effective area
Opening smooth valve: adjustabe from 0.2 to 4.6 mm² (0.00031 to 0.007 in²) effectively - We recommend the following adapters as accessories for direct
connection to a vacuum flange: - For the Swagelok version:
- 1/4" half nipple (e.g. 120FRA016-6-23), or
- 1/4" Swagelok adapter (e.g. 120ASW016-0250) + 1/4" tubing
- For the VCR version:
- VCR adapter, female, to KF (e.g. 120AVF016-0250) or to CF (e.g. 420AVF016-0250)
