Tube Valve, electromagnetic actuation, made by SMC
- High vacuum tube valves with Swagelok® compression fittings or VCR® sealing technology
- Pressure range: 10-8 to 10,000 mbar
- Valve plate seal: FKM, PE, PFA
- Use: Ventilation of chamber through gas inlet pipe
- Temperature range: 5 to 40°C (41 to 104 °F)
- Number of cycles to first maintenance: 2,000,000
- Packed for cleanroom suitability
- Normally closed
- Electrical connection: DIN-plug with screw-clamps or "Grommet", connection cable 280mm (11")
- Optional features:
Voltages: 6V, 12V, 24V, 48V
Others:crowbar, LED, spacer for assembly on base plate