X/Y-Präzisions-Manipulator, UHV
- Pressure range: 1 x 10-10 to 1000 mbar (abs.)
- Tightness: < 1 x 10-10 mbar x l/s
- Operating temperature: 80 °C
- Bakeout temperature: 250 °C
- Number of cycles: 10,000 at full deflection
- Materials:
- Diaphragm bellows: Stainless steel 316L
- Flange socket: Stainless steel 304L
- Flanges: Stainless steel 316LN ESU
- Housing: Anodized aluminum A5083
- Equipment and properties:
- No plastic components; completely bakeable
- Zero backlash
- Maximum x and y deflection fully usable simultaneously
- Optimized engineering through FEM calculations for extremely high resistance to deformation and prevention of positioning deviations due to pressure changes
- Identical flange size on both sides
- Clear inside-bellows diameter maximizes installation space
- User-definable installation orientation
- Easy to replace bellows
- Top connection flange with threaded holes, bottom connection flange with through holes
- Reproducible setting accuracy: 0.01 mm
- The large measuring and operating drums are easy to handle and enable precise adjustment with a resolution and reproducibility of 2 µm and a setting accuracy of 3 µm. A heating sleeve can be mounted on the bellows in the accessible installation area. (CAU
- Accessories:
- Custom attachments
- Z-axis manipulators
- Feedthroughs
- Measurement crosses
- Options:
- Motorization:
- Stepping motor
- Servo motor
- DC motor
- Motor control systems
- Other options:
- Dimensions adaptable to customer specifications
- Higher number of cycles
- Low-profile versions (threaded
coupling flange available)
